SECS/GEM Communications Toolkit for LabVIEW Download

SECS/GEM Communications Toolkit for LabVIEW

The SECS/GEM Communications Toolkit for LabVIEW is a LabVIEW add-on that streamlines the development of SEMI-compliant equipment and host interfaces for semiconductor manufacturing. It abstracts the low-level details of SECS and GEM so you can focus on tool functionality and fab integration, not byte packing or protocol state machines.

Key capabilities

Standards coverage: Implement core SECS/GEM functionality, including SECS-II messaging (SEMI E5) over HSMS-SS (SEMI E37) and, where needed, SECS-I (SEMI E4). Supports the GEM (SEMI E30) state models and services.
Host and equipment roles: Build either a fab host or an equipment interface using ready-to-use VIs and templates.
GEM services: Control and communications state models, remote commands, data collection (variables, collection events, and reports), alarms, spooling, PPID/recipe transfer hooks, and timely event reporting.
Message handling: Construct, parse, and validate SECS-II messages programmatically; optional SML import/export to aid development and troubleshooting.
Robust runtime: Connection management, configurable timeouts, heartbeat, and automatic recovery to handle network interruptions and maintain throughput.
Diagnostics: Raw and decoded message logging, traffic tracing, and example projects to accelerate bring-up and testing.
LabVIEW-native: Palette integration, queue-based/asynchronous VIs, and sample state machines that fit common LabVIEW application architectures.

Typical use cases

OEM equipment interfaces for lithography, etch, deposition, metrology, sorters, and material handling.
Fab host simulators, integration test benches, and tool acceptance testing.
Upgrading legacy tools from SECS-I to HSMS with minimal code changes.

What’s included